학술논문

プラズマ処理圧力変化による微細針状構造のFE特性

Document Type

Journal Article

Author

Source

JSAP Annual Meetings Extended Abstracts. 2011, :1857

Subject

26p-BG-15
field emission
nano-sized needle-shaped structure
plasma
プラズマエレクトロニクス
プラズマ成膜･表面処理

Language

Japanese

ISSN

2436-7613

이메일

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