학술논문

Characterization of carbon nitride film using MgO powders / MgO粉末を用いたアモルファス窒化炭素薄膜の特性評価
Document Type
Journal Article
Source
JSAP Annual Meetings Extended Abstracts. 2017, :1361
Subject
16p-P3-2
amorphous carbon nitride
カーボン系薄膜
薄膜・表面
非晶質カーボン薄膜
非晶質窒化炭素
Language
Japanese
ISSN
2436-7613