학술논문
High-precision ion-implantation on 4H-SiC by ion-implantation angle control / イオン注入角制御による4H-SiC基板へのイオン注入高精度化
Document Type
Journal Article
Author
Source
JSAP Annual Meetings Extended Abstracts. 2019, :3254
Subject
Language
Japanese
ISSN
2436-7613