학술논문
Study of etching mechanism of transition metal using neutral beam enhanced complex reaction based on tight-binding quantum chemical molecular dynamics / 中性粒子ビーム励起錯体反応による遷移金属エッチングメカニズムのTight-binding量子分子動力学法を用いた検討
Document Type
Journal Article
Author
Source
JSAP Annual Meetings Extended Abstracts. 2016, :1714
Subject
Language
Japanese
ISSN
2436-7613