학술논문
Development of a ferroelectric capacitor with double-layered PbLa(Zr,Ti)O3 thin films aiming to lowering operation voltage and leakage current of FRAM / 低電圧動作FRAMにおける低リーク電流積層PbLa(Zr,Ti)O3キャパシタの開発
Document Type
Journal Article
Author
Source
JSAP Annual Meetings Extended Abstracts. 2019, :1390
Subject
Language
Japanese
ISSN
2436-7613