학술논문
Improvement of polarization characteristics by optimizing heat treatment condition and IrOx oxidation state, and crystallization mechanism analysis in IrOx / PLZT / Pt / IrOx/PLZT/Pt強誘電体キャパシタにおける熱処理及びIrOx酸化度の最適化による分極特性向上と結晶化メカニズム解析
Document Type
Journal Article
Author
Source
JSAP Annual Meetings Extended Abstracts. 2018, :1320
Subject
Language
Japanese
ISSN
2436-7613