학술논문

Leakage mechanism of [Ba.sub.0.8][Sr.sub.0.2]Ti[O.sub.3]/Zr[O.sub.2] multilayer thin films
Document Type
Technical report
Source
Journal of Applied Physics. Oct 1, 2010, Vol. 108 Issue 7, p074112
Subject
Zirconium -- Thermal properties
Zirconium -- Electric properties
Barium compounds -- Structure
Barium compounds -- Thermal properties
Barium compounds -- Electric properties
Electric currents, Vagrant -- Measurement
Strontium -- Thermal properties
Strontium -- Electric properties
Titanium compounds -- Structure
Titanium compounds -- Electric properties
Titanium compounds -- Thermal properties
Language
English
ISSN
0021-8979
Abstract
The temperature and field dependence of the I-V characteristics of [Ba.sub.0.8][Sr.sub.0.2]Ti[O.sub.3] thin films and [Ba.sub.0.8][Sr.sub.0.2]Ti[O.sub.3]/Zr[O.sub.2] multilayer thin films on Pt/Ti/Si[O.sub.2]/Si substrates are analyzed. Leakage current behaviors of the film are studied and the bulk limited Poole-Frenkel mechanism has dominated the leakage current in the high field region.