부산대학교 도서관

To link to full-text access for this article, visit this link: http://dx.doi.org/10.1016/j.sna.2006.04.040 Byline: Roman Truckenmuller (a), Ralf Ahrens (a), Yue Cheng (a), Gunther Fischer (b), Volker Saile (a) Keywords: Microfluidics; Micropumps; High performance polymers (plastics); Polyetheretherketone (PEEK); Micro joining techniques; Ultrasonic welding Abstract: In this paper, a process for building up a new class of polymer fluidic microsensors and -actuators with foreign matter free, physicochemically inert flow paths for applications in the field of pharmaceutics, biotechnology and life sciences as well as for high temperature automotive applications is presented. It is based on first time ultrasonic (US) welding of real micro polymer parts. The performance of this novel 'micro US welding' based process, alone using standard US welding equipment, is demonstrated by the example of covering and sealing microchannels and assembling micro membrane check valves and a piezo driven micro membrane pump. With the welding power as process termination criterion, accuracies of the relative welding depth in the range of only [+ or -]1[mu]m were achieved. The sealed channels have a width and depth of 500[mu]m. The outer size of the cuboidal single check valves is 3mmx3mmx2mm. The valves show a low flow resistance in forward direction and shut tight in reverse direction. The discoidal piezo pump has a diameter of 14mm. Delivering water, the pump achieves a maximum flow rate and back pressure of about 3ml/min and more than 750hPa, respectively. Author Affiliation: (a) Forschungszentrum Karlsruhe, Institut fur Mikrostrukturtechnik (IMT), Hermann-von-Helmholtz-Platz 1, D-76344 Eggenstein-Leopoldshafen, P.O. Box 3640, D-76021 Karlsruhe, Germany (b) University of Applied Sciences Esslingen, FHTE, Germany Article History: Received 29 September 2005; Revised 30 March 2006; Accepted 12 April 2006