학술논문
Two-Stage Sintering of Yttrium Iron Garnet Ceramics for Magnetron Sputtering
Document Type
Academic Journal
Author
Source
Journal of Communications Technology and Electronics. June, 2022, Vol. 67 Issue 6, p690, 2 p.
Subject
Language
English
ISSN
1064-2269
Abstract
A two-stage process of sintering yttrium iron garnet ceramics for magnetron sputtering has been proposed and tested. It has been shown that uniaxial pressing of compacts results in the synthesis of nanosized crystallites of yttrium iron garnet. The crystal structure of the obtained ceramic samples has been studied. Epitaxial films are grown on yttrium aluminum garnet substrates by magnetron sputtering of the obtained target.
Author(s): V. A. Luzanov [sup.1], V. V. Balashov [sup.1], K. V. Lopukhin [sup.1] Author Affiliations: (1) grid.4886.2, 0000 0001 2192 9124, Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch, Russian [...]
Author(s): V. A. Luzanov [sup.1], V. V. Balashov [sup.1], K. V. Lopukhin [sup.1] Author Affiliations: (1) grid.4886.2, 0000 0001 2192 9124, Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch, Russian [...]