학술논문
Geometrical Characterisation of TiO[sub.2]-rGO Field-Effect Transistor as a Platform for Biosensing Applications
Document Type
Academic Journal
Author
Source
Micromachines. August 2023, Vol. 14 Issue 9
Subject
Language
English
ISSN
2072-666X
Abstract
Author(s): Anis Amirah Alim [1]; Roharsyafinaz Roslan [1]; Sh. Nadzirah [1,2]; Lina Khalida Saidi [3]; P. Susthitha Menon [1]; Ismail Aziah [4]; Dee Chang Fu [1]; Siti Aishah Sulaiman [3]; [...]
The performance of the graphene-based field-effect transistor (FET) as a biosensor is based on the output drain current (I[sub.d]). In this work, the signal-to-noise ratio (SNR) was investigated to obtain a high-performance device that produces a higher I[sub.d] value. Using the finite element method, a novel top-gate FET was developed in a three-dimensional (3D) simulation model with the titanium dioxide-reduced graphene oxide (TiO[sub.2]-rGO) nanocomposite as the transducer material, which acts as a platform for biosensing application. Using the Taguchi mixed-level method in Minitab software (Version 16.1.1), eighteen 3D models were designed based on an orthogonal array L[sub.18] (6[sup.1]3[sup.4]), with five factors, and three and six levels. The parameters considered were the channel length, electrode length, electrode width, electrode thickness and electrode type. The device was fabricated using the conventional photolithography patterning technique and the metal lift-off method. The material was synthesised using the modified sol–gel method and spin-coated on top of the device. According to the results of the ANOVA, the channel length contributed the most, with 63.11%, indicating that it was the most significant factor in producing a higher I[sub.d] value. The optimum condition for the highest I[sub.d] value was at a channel length of 3 µm and an electrode size of 3 µm × 20 µm, with a thickness of 50 nm for the Ag electrode. The electrical measurement in both the simulation and experiment under optimal conditions showed a similar trend, and the difference between the curves was calculated to be 28.7%. Raman analyses were performed to validate the quality of TiO[sub.2]-rGO.
The performance of the graphene-based field-effect transistor (FET) as a biosensor is based on the output drain current (I[sub.d]). In this work, the signal-to-noise ratio (SNR) was investigated to obtain a high-performance device that produces a higher I[sub.d] value. Using the finite element method, a novel top-gate FET was developed in a three-dimensional (3D) simulation model with the titanium dioxide-reduced graphene oxide (TiO[sub.2]-rGO) nanocomposite as the transducer material, which acts as a platform for biosensing application. Using the Taguchi mixed-level method in Minitab software (Version 16.1.1), eighteen 3D models were designed based on an orthogonal array L[sub.18] (6[sup.1]3[sup.4]), with five factors, and three and six levels. The parameters considered were the channel length, electrode length, electrode width, electrode thickness and electrode type. The device was fabricated using the conventional photolithography patterning technique and the metal lift-off method. The material was synthesised using the modified sol–gel method and spin-coated on top of the device. According to the results of the ANOVA, the channel length contributed the most, with 63.11%, indicating that it was the most significant factor in producing a higher I[sub.d] value. The optimum condition for the highest I[sub.d] value was at a channel length of 3 µm and an electrode size of 3 µm × 20 µm, with a thickness of 50 nm for the Ag electrode. The electrical measurement in both the simulation and experiment under optimal conditions showed a similar trend, and the difference between the curves was calculated to be 28.7%. Raman analyses were performed to validate the quality of TiO[sub.2]-rGO.