학술논문

Surface modification technique for acoustic chemical sensor arrays based on CMUTs
Document Type
TEXT
Author
Source
Subject
Industrial and craft manufacturing
acoustic sensor; CMUT; modification in 2 steps; gas sensor
Industrielle und handwerkliche Fertigung
akustischer Sensor; CMUT; Modifizierung in 2 Schritten; Gassensor
acoustic wave sensor; CMUT; 2-step modification; gas sensor
Language
English
Abstract
Halle (Saale), Martin-Luther-Universität Halle-Wittenberg, Diss., 2011