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Vibrational spectroscopy characterization of magnetron sputtered silicon oxide and silicon oxynitride films

Document Type

Article

Author

Godinho, V.; Denisov, V.N.; Mavrin, B.N.; Novikova, N.N.; Vinogradov, E.A.; Yakovlev, V.A.; Fernández-Ramos, C.; de Haro, M.C. Jiménez; Fernández, A.

Source

In Applied Surface Science 2009 256(1):156-164

Subject

Language

ISSN

0169-4332

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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