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UV cure of oxycarbosilane low-k films

Document Type

Article

Author

Redzheb, M.; Prager, L.; Krishtab, M.; Armini, S.; Vanstreels, K.; Franquet, A.; Van Der Voort, P.; Baklanov, M.R.

Source

In Microelectronic Engineering 20 April 2016 156:103-107

Subject

Language

ISSN

0167-9317

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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