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Hydrogen diffusion coefficient of silicon nitride thin films

Document Type

Article

Author

Yu, George C.; Yen, S.K.

Source

In Applied Surface Science 2002 201(1):204-207

Subject

Language

ISSN

0169-4332

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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