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Effects of thin film properties on metallic pattern formation by direct nanoimprint

Document Type

Article

Author

Yao, C.H.; Wu, C.L.; Sung, C.K.

Source

In Journal of Materials Processing Tech. 2008 201(1):765-769

Subject

Language

ISSN

0924-0136

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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