학술논문

List of contributors
Document Type
Author
Aalto, TimoAiraksinen, Veli-MattiAlbert, Stephan GerhardAllegato, GiorgioAmiotti, MarcoAnttila, OlliAuersperg, JuergenBonucci, AntonioBose, Indranil RonnieBraun, TanjaBroas, MikaelBurggraf, J.Cameron, ChristopherCandler, Rob N.Cao, ZhenCardoso, AndréChen, Kuo-ShenConte, AndreaCozma, AdrianaDavis, Cristina E.Dempwolf, SophiaDixit, PradeepDost, MichaelDragoi, ViorelEränen, SimoFain, BrunoFigeys, B.Fischer, Andreas C.Flötgen, ChristophFranssila, SamiFriedberger, AloisFueldner, MarcGanchenkova, MariaGonzalez, PilarGosálvez, Miguel A.Grimes, MichaelHaapalinna, AtteHagelin, PaulHammond, PaulHenttinen, KimmoHenttonen, VesaHorsley, DavidHoshi, TakeoItoh, SatoshiJakobsen, HenrikJansen, R.Jonsson, KerstinKähler, DirkKannojia, Harindra KumarKattelus, HannuKissinger, GudrunKnechtel, RoyKnese, KathrinKolari, KaiKoskenvuori, MikaKuisma, HeikkiKulkarni, AmitLaermer, FranzLandesberger, ChristofLeinenbach, ChristinaLeVasseur, Michael K.Li, JueLin, YuyuanLindner, Paul F.Lodewijks, K.Lofink, FabianLongoni, GiorgioLuber, Sebastian MarkusMahmud-ul-hasan, M.Mäkinen, JariMäntysalo, MattiMartin, DevinMaspero, FedericoMattila, Toni T.Mauri, LucaMerz, PeterMeyer, DougMoraja, MarcoMotooka, TeruakiMüller, GerhardMuralt, PaulNieminen, Risto M.Niklaus, FrankOggioni, LauraOlkkonen, JuusoÖsterlund, ElmeriOu, Kuang-ShunPaloheimo, JariPasanen, Toni P.Paulasto-Kröckel, MerviPlach, ThomasPolizzi, Jean-PhilippePressel, KlausPutkonen, MattiPuurunen, Riikka L.Reinert, WolfgangRizzi, EneaRochus, V.Ross, GlennRottenberg, X.Sainiemi, LauriSavin, HeleSchenk, HaraldSchikowski, MarcSchulze, MatthiasSeema, S.Severi, S.Skogström, LasseSuga, TadatomoSullivan, ScottSuni, TommiTheuss, HorstTilli, MarkkuTilmans, H.A.C.Tittonen, IlkkaTofteberg, HannahTörmä, PekkaTuomikoski, SanteriTyholdt, FrodeUda, TsuyoshiVallin, ÖrjanValzasina, CarloVeijola, TimoViinikka, EevaVogel, DietmarVogl, AndreasVuorinen, VesaWestervelde, W.J.Wicht, SebastianWieland, RobertWinkler, BernhardYobas, LeventZanotti, LucaZubel, I.
Source
In Handbook of Silicon Based MEMS Materials and Technologies Edition: Third Edition. 2020:xv-xvii
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