학술논문
Study of substrate orientations impact on Ultra Thin Buried Oxide (UTBOX) FDSOI High-K Metal gate technology performances
Document Type
Article
Author
Ben Akkez, Imed; Fenouillet-Beranger, Claire; Cros, Antoine; Perreau, Pierre; Haendler, Sébatien; Weber, Olivier; Andrieu, François; Pellissier-Tanon, D.; Abbate, F.; Richard, C.; Beneyton, R.; Gouraud, P.; Margain, A.; Borowiak, C.; Gourvest, E.; Bourdelle, K.K.; Nguyen, B.Y.; Poiroux, T.; Skotnicki, Thomas; Faynot, Olivier; Balestra, Francis; Ghibaudo, Gérard; Boeuf, Fréderic
Source
In Solid State Electronics December 2013 90:143-148
Subject
Language
ISSN
0038-1101