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Integration of epitaxial La2/3Sr1/3MnO3 thin films on silicon-on-sapphire substrate for MEMS applications

Document Type

Article

Author

Chaluvadi, Sandeep Kumar; Wang, Zhe; Carvalho de Araújo, Laryssa M.; Orgiani, Pasquale; Polewczyk, Vincent; Vinai, Giovanni; Rousseau, Olivier; Pierron, Victor; Pautrat, Alain; Domengès, Bernadette; Schlom, Darrell G.; Méchin, Laurence

Source

In Applied Surface Science 30 March 2022 579

Subject

Language

ISSN

0169-4332

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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