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Laser Ablation Mechanism Of Silicon Nitride Layers In A Nanosecond UV Regime

Document Type

Article

Author

Poulain, G.; Blanc, D.; Focsa, A.; Vita, M.De; Semmache, B.; Gauthier, M.; Pellegrin, Y.; Lemiti, M.

Source

In Energy Procedia 2012 27:516-521

Subject

Language

ISSN

1876-6102

Online Access

Full Text (ScienceDirect 종량제) Full Text (ScienceDirect O/A) Open Access (EBSCO) Find it@PNU

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