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Development of large diameter radical beam sources

Document Type

Article

Author

Murata, T ; Matsumoto, S; Song, Y; Yamada, Y; Nozoye, H

Source

In Thin Solid Films 2000 377:134-137

Subject

Language

ISSN

0040-6090

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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