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Atom probe tomography for advanced nanoelectronic devices: Current status and perspectives

Document Type

Article

Author

Barnes, J.P.; Grenier, A.; Mouton, I.; Barraud, S.; Audoit, G.; Bogdanowicz, J.; Fleischmann, C.; Melkonyan, D.; Vandervorst, W.; Duguay, S.; Rolland, N.; Vurpillot, F.; Blavette, D.

Source

In Scripta Materialia 15 April 2018 148:91-97

Subject

Language

ISSN

1359-6462

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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