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Properties of Zr–Si–N coatings prepared by RF reactive sputtering

Document Type

Article

Author

Nose, M ; Zhou, M; Nagae, T; Mae, T; Yokota, M; Saji, S

Source

In Surface & Coatings Technology 2000 132(2):163-168

Subject

Language

ISSN

0257-8972

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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