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Design and characterization of MIKES metrological atomic force microscope

Document Type

Article

Author

Korpelainen, V.; Seppä, J.; Lassila, A.

Source

In Precision Engineering 2010 34(4):735-744

Subject

Language

ISSN

0141-6359

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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