학술논문 – 부산대학교 도서관

학술논문

replay검색결과 돌아가기

search검색화면

EPL electron optics performance on test stand.: 1. Resolution results

Document Type

Article

Author

Hamashima, M ; Kojima, S; Umemoto, T; Shimizu, H; Ikeda, J; Yamada, A; Takahashi, S; Yahiro, T; Shimizu, S; Okamoto, K; Yamaguchi, T; Miura, S; Kawata, S; Suzuki, K

Source

In Microelectronic Engineering 2003 67:109-121

Subject

Language

ISSN

0167-9317

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

이메일