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Processing issues in silicon nanocrystal manufacturing by ultra-low-energy ion-beam-synthesis for non-volatile memory applications

Document Type

Article

Author

Normand, P.; Dimitrakis, P.; Kapetanakis, E.; Skarlatos, D.; Beltsios, K.; Tsoukalas, D.; Bonafos, C.; Coffin, H.; Benassayag, G.; Claverie, A.; Soncini, V.; Agarwal, A.; Sohl, Ch.; Ameen, M.

Source

In Microelectronic Engineering 2004 73:730-735

Subject

Language

ISSN

0167-9317

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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