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Properties of the plasma produced by multi-cathode electron beam plasma sources

Document Type

Article

Author

Kang, Y.B; Jeon, H ; Kim, T.Y; Chung, K.H; Ko, D.K; Jung, J.K; Noh, S.J

Source

In Thin Solid Films 1999 341(1):9-12

Subject

Language

ISSN

0040-6090

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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