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A SrRuO 3/IrO 2 top electrode FeRAM with Cu BEOL process for embedded memory of 130 nm generation and beyond

Document Type

Article

Author

Kumura, Y.; Ozaki, T.; Kanaya, H.; Hidaka, O.; Shimojo, Y.; Shuto, S.; Yamada, Y.; Tomioka, K.; Yamakawa, K.; Yamazaki, S.; Takashima, D.; Miyakawa, T.; Shiratake, S.; Ohtsuki, S.; Kunishima, I.; Nitayama, A.

Source

In Solid State Electronics 2006 50(4):606-612

Subject

Language

ISSN

0038-1101

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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