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Very low temperature growth of GeSi alloys with digermane, disilane and dichlorosilane

Document Type

Article

Author

Source

In Journal of Crystal Growth 15 September 2020 546

Subject

Language

ISSN

0022-0248

Online Access

Full Text (ScienceDirect 종량제) Web of Science JCR 저널정보 Scopus Find it@PNU

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