학술논문
Properties of ultrathin molybdenum films for interconnect applications
Document Type
Article
Author
Founta, Valeria; Soulié, Jean-Philippe; Sankaran, Kiroubanand; Vanstreels, Kris; Opsomer, Karl; Morin, Pierre; Lagrain, Pieter; Franquet, Alexis; Vanhaeren, Danielle; Conard, Thierry; Meersschaut, Johan; Detavernier, Christophe; Van de Vondel, Joris; De Wolf, Ingrid; Pourtois, Geoffrey; Tőkei, Zsolt; Swerts, Johan; Adelmann, Christoph
Source
In Materialia August 2022 24
Subject
Language
ISSN
2589-1529