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Al3Sc thin films for advanced interconnect applications

Document Type

Article

Author

Soulié, Jean-Philippe; Sankaran, Kiroubanand; Founta, Valeria; Opsomer, Karl; Detavernier, Christophe; Van de Vondel, Joris; Pourtois, Geoffrey; Tőkei, Zsolt; Swerts, Johan; Adelmann, Christoph

Source

In Microelectronic Engineering 1 March 2024 286

Subject

Language

ISSN

0167-9317

Online Access

Full Text (ScienceDirect 종량제) Web of Science JCR 저널정보 Scopus Find it@PNU

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