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Influence of in situ nitrogen pressure on crystallization of pulsed laser deposited AlN films

Document Type

Article

Author

Bakalova, S.; Szekeres, A.; Cziraki, A.; Lungu, C.P.; Grigorescu, S.; Socol, G.; Axente, E.; Mihailescu, I.N.

Source

In Applied Surface Science 2007 253(19):8215-8219

Subject

Language

ISSN

0169-4332

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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