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Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask

Document Type

Article

Author

Wu, Meiyi; de Marneffe, Jean-François; Opsomer, Karl; Detavernier, Christophe; Delabie, Annelies; Naujok, Philipp; Caner, Özge; Goodyear, Andy; Cooke, Mike; Saadeh, Qais; Soltwisch, Victor; Scholze, Frank; Philipsen, Vicky

Source

In Micro and Nano Engineering August 2021 12

Subject

Language

ISSN

2590-0072

Online Access

Full Text (ScienceDirect 종량제) Full Text (ScienceDirect O/A) Web of Science JCR 저널정보 Scopus Find it@PNU

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