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GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride

Document Type

Article

Author

Bosund, M.; Mattila, P.; Aierken, A.; Hakkarainen, T.; Koskenvaara, H.; Sopanen, M.; Airaksinen, V.-M.; Lipsanen, H.

Source

In Applied Surface Science 2010 256(24):7434-7437

Subject

Language

ISSN

0169-4332

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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