학술논문 – 부산대학교 도서관

학술논문

replay검색결과 돌아가기

search검색화면

The effect of nitrogen on the chemistry of sputter-deposited SiC xN y films

Document Type

Article

Author

Alizadeh, Z; Sundaram, K.B ; Seal, S

Source

In Applied Surface Science 2001 183(3):270-277

Subject

Language

ISSN

0169-4332

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

이메일