학술논문
Defect formation in SiO2 formed by thermal oxidation of SiC
Document Type
Conference Paper
Author
Source
In: 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings , 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings. (2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings, 13 June 2017, :242-243)
Subject
Language
English