학술논문

Low vibration sensitivity MEMS resonators
Document Type
Conference Paper
Source
In: Proceedings of the IEEE International Frequency Control Symposium and Exposition, 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, FCS. (Proceedings of the IEEE International Frequency Control Symposium and Exposition, 2007, :1220-1224)
Subject
Language
English