학술논문
Low vibration sensitivity MEMS resonators
Document Type
Conference Paper
Author
Source
In: Proceedings of the IEEE International Frequency Control Symposium and Exposition , 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, FCS. (Proceedings of the IEEE International Frequency Control Symposium and Exposition, 2007, :1220-1224)
Subject
Language
English