학술논문
Molecular dynamics study of non-linear sputtering
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Seventh International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering. (Proceedings of SPIE - The International Society for Optical Engineering, 2004, 5400:78-84)
Subject
Language
English
ISSN
0277786X