학술논문
Impact of Line and Via Resistance on Device Performance at the 5nm Gate All Around Node and beyond
Document Type
Conference Paper
Author
Source
In: 2018 IEEE International Interconnect Technology Conference, IITC 2018 , 2018 IEEE International Interconnect Technology Conference, IITC 2018. (2018 IEEE International Interconnect Technology Conference, IITC 2018, 8 August 2018, :70-72)
Subject
Language
English