학술논문
CMOS compatible MIM decoupling capacitor with reliable sub-nm EOT high-k stacks for the 7 nm node and beyond
Document Type
Conference Paper
Author
Source
In: Technical Digest - International Electron Devices Meeting, IEDM , 2016 IEEE International Electron Devices Meeting, IEDM 2016. (Technical Digest - International Electron Devices Meeting, IEDM, 31 January 2017, :9.4.1-9.4.4)
Subject
Language
English
ISSN
01631918