학술논문
Area Scalable Hafnium-Zirconium-Oxide Ferroelectric Capacitor Using Low-Temperature Back-End-of-Line Compatible 40°C Annealing
Document Type
Conference Paper
Author
Source
In: 2022 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2022 , 2022 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2022. (2022 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2022, 2022)
Subject
Language
English