학술논문
Integration of BEoL Compatible 1T1C FeFET Memory Into an Established CMOS Technology
Document Type
Conference Paper
Author
Source
In: 2022 IEEE International Memory Workshop, IMW 2022 - Proceedings , 2022 IEEE International Memory Workshop, IMW 2022 - Proceedings. (2022 IEEE International Memory Workshop, IMW 2022 - Proceedings, 2022)
Subject
Language
English