학술논문
Quantitative determination of depth carrier profiles in ion-implanted Gallium Nitride
Document Type
Article
Source
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms . (Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, April 2007, 257 1-2 SPEC. ISS.:336-339)
Subject
Language
English
ISSN
0168583X