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Design and Characterization of 5 μm Pitch InGaAs Photodiodes Using In Situ Doping and Shallow Mesa Architecture for SWIR Sensing †

Document Type

Article

Author

Tillement, J.; Georges, S.; Mugny, G.; Roy, F.; Boeuf, F.; Cervera, C.; Baylet, J.; Jany, C.; Nardelli, F.; Di Rito, T.; Saxod, O.; Gravrand, O.; Baron, T.

Source

In: Sensors. (Sensors, November 2023, 23(22))

Subject

Language

English

ISSN

14248220

Online Access

EBSCOHost PDF Full Text (ProQuest Central) Full Text (Gale Academic Onefile) Web of Science JCR 저널정보 Scopus Find it@PNU

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