학술논문
Spectral analysis of sidewall roughness during resist-core self-aligned double patterning integration
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics . (Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 1 September 2016, 34(5))
Subject
Language
English
ISSN
21662754
21662746
21662746