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Effect of H atoms and UV wideband radiation on cured low- k OSG films

Document Type

Article

Author

Lopaev, D.V.; Zotovich, A.I.; Zyryanov, S.M.; Bogdanova, M.A.; Rakhimova, T.V.; Mankelevich, Y.A.; Novikova, N.N.; Seregin, D.S.; Vishnevskiy, A.S.; Vorotilov, K.A.; Baklanov, M.R.; Shi, X.

Source

In: Journal of Physics D: Applied Physics. (Journal of Physics D: Applied Physics, 23 June 2022, 55(25))

Subject

Language

English

ISSN

13616463
00223727

Online Access

Full Text (IOP Science) Full Text (IOP) Web of Science JCR 저널정보 Scopus Find it@PNU

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