학술논문
Towards high-Q 1D photonic crystal waveguide resonator in SOI for mid-infrared applications
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Silicon Photonics XVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11691)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X