학술논문
Unbiased line edge roughness measurement using profile-averaging method for precise roughness parameters measurement
Document Type
Article
Author
Source
In: Journal of Micro/Nanopatterning, Materials and Metrology . (Journal of Micro/Nanopatterning, Materials and Metrology, 1 April 2022, 21(2))
Subject
Language
English
ISSN
27088340
19325150
19325150