학술논문
Dark-field electron holography as a recording of crystal diffraction in real space: A comparative study with high-resolution X-ray diffraction for strain analysis of MOSFETs
Document Type
Article
Author
Source
In: Journal of Applied Crystallography . (Journal of Applied Crystallography, 1 August 2020, 53:885-895)
Subject
Language
English
ISSN
16005767
00218898
00218898