학술논문
Incubation effect during laser micromachining of GaN films with femtosecond pulses
Document Type
Article
Author
Source
In: Journal of Materials Science: Materials in Electronics . (Journal of Materials Science: Materials in Electronics, 1 September 2019, 30(18):16821-16826)
Subject
Language
English
ISSN
1573482X
09574522
09574522