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Modification of Porous Ultralow- k Film by Vacuum Ultraviolet Emission

Document Type

Article

Author

Zotovich, A.I.; Zyryanov, S.M.; Lopaev, D.V.; Bogdanova, M.A.; Palov, A.P.; Rakhimova, T.V.; Rakhimov, A.T.; Rezvanov, A.A.; Attallah, A.G.; Liedke, M.O.; Butterling, M.; Hirschmann, E.; Wagner, A.; Vishnevskiy, A.S.; Seregin, D.S.; Vorotyntsev, D.A.; Vorotilov, K.A.; Naumov, S.; Baklanov, M.R.

Source

In: ACS Applied Electronic Materials. (ACS Applied Electronic Materials, 28 June 2022, 4(6):2760-2776)

Subject

Language

English

ISSN

26376113

Online Access

Full Text (ACS) Web of Science JCR 저널정보 Scopus Find it@PNU

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